Tel Number
180-3717-8440
Model:KJ-TCVD1100-S40CK2
Description:
Introduction:
This tube CVD system mainly consists of: a 1200-degree dual-temperature zone tube furnace, a 3-channel mass flow meter gas supply system, a 2L/S p
Accurate temperature control. Temperature control is accurate ± 1 ℃.
Good heat preservation, fast heating, energy saving, long life and safety. customizable.
Adopt intelligent integrated design, safe, reliable and fast heating up.
Multi-temperature zone tube furnace can realize independent temperature control of multiple temperature zones.
Product name | KJ-TCVD1100-S40CK2 Model Vertical tube furnace CVD system |
1200 degree fluidized tube furnace | |
Furnace chamber model | Dual temperature zone vertical opening structure, easy to take and place the furnace tube |
Chamber material | Alumina refractory fiber |
Heating element | High quality heating wire |
Max. temperature | 1200℃ |
Working temperature | ≤1100℃ |
Heating rate | 0-10℃/min |
Heating zone | double zone(Independent temperature control for each temperature zone) |
Furnace tube material | Customized high purity quartz |
Furnace tube outer diameter | 40mm |
The length of the furnace tube is approx. | 1100mm(Subject to actual needs) |
Sealing method | A set of customized stainless steel vacuum flanges including sealing rings |
control mode | Touch screen multi-stage intelligent PID program temperature control, sintering data can be recorded and exported in excel format |
Temperature curve | Multiple "time-temperature curves" can be set arbitrarily |
Temperature measuring element | N type thermocouple temperature measurement |
Power supply | 220V 50HZ |
Power approx. | 6KW(Subject to actual needs) |
Air supply system: 3-way mass flow control system | |
Operating Voltage | 220V/50HZ |
Maximum output power | 18W |
Working temperature | 5--45℃ |
Maximum air pressure | 3*106Pa |
gas channel | Can connect 3 kinds of air sources to micro positive pressure at the same time |
flow meter | Mass flow meter (other ranges optional) |
A channel range | 1SLM |
B channel range | 1SLM |
c channel range | 1SLM |
Air line pressure | -0.1~0.15 MPa |
Accuracy | ±1%F.S |
Shut-off valve | Stainless steel material |
Gas connection pipe | 1/4 stainless steel pipe |
Vacuum system | |
Vacuum pump | 2L/S speed vacuum pump with silicone hose can quickly replace the gas in the furnace tube |
Tel Number
180-3717-8440
web@kejiafurnace.com
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